Run-to-Run Control in Semiconductor Manufacturing

The Set-Valued Run-to-Run Controller in Semiconductor Manufacturing Processes

In semiconductor manufacturing, run-to-run (RtR) control is paid more and more attention. In this paper a set-valued RtR control scheme is introduced. Di erent from conventional RtR control methods, the set-valued method rst calculates the feasible parameter set at the beginning of each run, then estimates the model parameters within this set. Compared to other RtR control schemes, it does not ...

Nonlinear Run-to-Run Controller for Semiconductor Manufacturing

Run-to-run control is a generic methodology in control of semiconductor manufacturing processes. It is a model based process control strategy whereby process inputs (recipes) are adjusted on a run-to-run basis in response to measurements (responses) of process state variables. It updates the recipes of the process at the beginning of each run. In semiconductor manufacturing, many processes are ...

Nonlinear Run-to-Run Controller for Semiconductor Manufacturing C. Zhang / Advisor: J. S. Baras -- Systems Engineering and Integration Laboratory

Future Work Run-to-run control is a generic methodology in control of semiconductor manufacturing processes. In semiconductor manufacturing, if the perturbations are small enough, they can be compensated successfully using the exponential weighted moving average (EWMA) method. But, unfortunately, this is not always the case. For example, many plasma processes have been shown to exhibit small to...

A batch-based run-to-run process control scheme for semiconductor manufacturing

Run-to-Run (R2R) control has been widely used in semiconductor manufacturing to compensate for process disturbance and to improve quality. The traditional R2R controller only takes the process output in a previous run as its input and generates an optimal recipe for the next run. In a multistage semiconductor manufacturing process, variations in upstream stations are propagated to downstream st...

Performance Monitoring of Run-to-Run Control Systems Used in Semiconductor Manufacturing